BROOKS AUTOMATION控制器維修

簡要描述：BROOKS AUTOMATION控制器維修978-262-2900（165463）

產(chǎn)品型號：978-262-2900（165463）
廠商性質(zhì)：經(jīng)銷商
更新時間：2025-09-17
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詳情介紹

BROOKS AUTOMATION控制器維修978-262-2900（165463）

MKS SENTRY 1510流量計AERA EPV100-AW

TEL設(shè)備流量計維修ckd tpr4-35-A100T-X0002

cooling

temperature under 25° C and a backing pump of 10,000 l/min size or larger used.

The value is changed if operated under different conditions

Technical Data

STP-iXA4506 Series/Pumping Speed Against Inlet Pressure

EDwardsSTP-H1303C分子泵加SCU-800控制器現(xiàn)貨

HORIBA流量計LF-A40M-A-EVD TEOS 6g/min AMAT3030-14548

HORIBA流量計VC-1420 200sccm控制器8000CB

0190-14992應(yīng)用材料RF

32822 HORIBASTEC噴射閥AMAT 3870-02238 IV-2410AV

ULVAC低溫冷凝泵RM120ET電機冷泵壓縮機維修

深圳市天鉉真空技術(shù)有限公司

ULVAC愛發(fā)科低溫泵U20P冷泵U16HSPL壓縮機U20BLM

EDwardsCTICRYOGENICS IS-1000壓縮機HORIBA SEC-7340R H20 50SCCM流量計

噴涂機涂布日本多摩川SCREEN電機3510N34E13

HORIBA IV-2410AV-03/3030-10059噴射閥
七星華創(chuàng)流量計D07-7B氬氣100sccm***深圳市天鉉真空技術(shù)有限公司
Fil-tech G8136P/1美國FIL-TECH 離子規(guī)真空規(guī)
Fil-tech品牌以下產(chǎn)品都可預(yù)訂，歡迎咨詢
3300002 G75PT; 7631-0001-0002 G75KT;
3300008 TC004V; 5300019 G100PT;
K7360301 G100PT; 4053050 G100KTF;
3310-90003 G100PT; 3310-01014 G100KC;
33S0298 G75PT-02S; 27-229-700-00 G8136P/1;
K2466301 G100PC; K2466302 G100KC;
K2466303 G100KCF; K2466304 G75PC;
K2466305 G75KC; K2471301 G100P;
K2471302 G100K; K2471303 G100KF;
K2471304 G75P; K2471305 G75K;
K7360301 G100PT; K7360302 G100KT;
K7360303 G75PT; K7360304 G75KT;
K7360307 G100KTF; K2500301 G8136P/1;
K2500302 G8136K/1; K2500303 G8136F;
274002 G75P; 274003 G75K;

AE bbbbbount1513電源若使用設(shè)備：bbb的bbbIUS-SCCM

036-006908-1 SENSOR,PRESSURE...41B13DGA2AA040 (1個)?←MKS的標(biāo)準(zhǔn)品
2L81-050047-21 PCB ASSY,TYB62K-2/DCFA-LF? (1個)
BX80-000290-11 BATTERY ASSY,LM ARM...SBX (1個)
BX80-000328-13 LOADER ARM,CART...SBX-3 (1個)
BX80-000330-11 CONTROLLER...SBX (1個)
2L81-050054-14 PCB ASSY,TYB514-1/IO48-LF (2個)
2L80-002259-13 BOX ASSY...PPC3 MCRACK (1個)
3D10-100845-11 PLATE,EXHAUST Y-AL SE(2個)
2L13-000110-11 CHILLER..HRZ010-WS-A2-X082(數(shù)量確認(rèn)中)
2L80-000485-73 PCB,I/F..TAB229-7/GAS2-LF(數(shù)量確認(rèn)中)
2L80-000512-14 PCB,I/F..TAB218-1/BTM2-LF(數(shù)量確認(rèn)中)
2L80-006087-11 RACK ASSY,EPD FSR-CPCI-05TEW(數(shù)量確認(rèn)中)
3D10-100910-12 SHIELD,DEPO Y-AL SE,GROOVE (數(shù)量確認(rèn)中???應(yīng)該是3個)
3D10-100930-13 ELECTRODE BTM,12Y HT-IST LIB (數(shù)量確認(rèn)中???應(yīng)該是3個)
3D10-100936-13 PLATE,DEVERGE BEL IST-LIB IST-LIB(數(shù)量確認(rèn)中???應(yīng)該是3個)
3D10-250476-11 HOLDER,INSULATOR 290-381-9Q (數(shù)量確認(rèn)中???應(yīng)該是3個)
3D10-250542-11 INSULATOR,LOWER (RE) (數(shù)量確認(rèn)中???應(yīng)該是3個)
3D10-350585-11 SPIRAL GAS INLET,UPPER AL2O3 (數(shù)量確認(rèn)中)
3D10-350586-11 SPIRAL GAS INLET,LOWER AL2O3 (數(shù)量確認(rèn)中)
3D10-350587-12 PUSHER PIN(DITCH-PE) ?(數(shù)量確認(rèn)中???應(yīng)該是6個)
3D80-000906-42 SENSOR,EPD SEPD H VTY-SD-1024?(數(shù)量確認(rèn)中???應(yīng)該是3個)